Apparatuses for forming wire bonds from circuitry on a substrate to a semiconductor chip, and methods of forming semiconductor chip assemblies

ABSTRACT

The invention encompasses a method of forming a semiconductor chip assembly. A substrate is provided. Such substrate has a pair of opposing surfaces and circuitry formed on one of the opposing surfaces. A semiconductor chip is joined to the substrate. The semiconductor chip has bonding regions thereon. A plurality of wires join to the circuitry and extend over the bonding regions of the semiconductor chip. The wires are pressed down to about the bonding regions of the semiconductor chip with a tool. The tool is lifted from the wires, and subsequently the wires are adhered to the bonding regions of the semiconductor chip. The invention also encompasses an apparatus for forming wire bonds from circuitry on a substrate to a semiconductor chip joined to the substrate. Such apparatus comprises a support for supporting the substrate and the semiconductor chip. The apparatus further comprises a pressing tool movably mounted relative to the substrate, and which has a deflecting surface configured to press the wires into a slit of the substrate when the pressing tool is moved toward the substrate. The deflecting surface is substantially planar, and has a sufficient length to extend within a predominate portion of the slit.

This application is a divisional of pending U.S. patent application No.09/378,552, filed Aug. 19, 1999 and issued on Mar. 13, 2001 as U.S. Pat.No. 6,199,743.

TECHNICAL FIELD

The invention pertains to methods and apparatuses for formingsemiconductor chip assemblies. In particular aspects, the inventionpertains to methods and apparatuses for forming wire bonds inboard-on-chip packages.

BACKGROUND OF THE INVENTION

A prior art method of forming a board-on-chip package (which can begenerally referred to as a die package) is described with reference toFIGS. 1-5. Referring first to FIG. 1, such illustrates a fragment of anassembly 10 comprising an insulative material Substrate 12. Substrate 12can comprise, for example, a circuit board.

Substrate 12 comprises a top surface 13 and slits 18 extendingtherethrough. Circuitry 16 is formed on top of surface 13. Circuitry 16and slits 18 form repeating patterns across top surface 13. Therepeating patterns define separate units 19, 21 and 23, each of whichultimately forms a separate board-on-chip package.

Referring to FIGS. 2-4, an enlarged segment of substrate 12,corresponding to unit 21, is shown in three different views. FIG. 2 is atop view similar to the view of FIG. 1, FIG. 3 is view along the line3—3 of FIG. 2, and FIG. 4 is a view along the line 4—4 of FIG. 3.Substrate 12 is inverted in the view of FIG. 3 relative to the view ofFIGS. 1 and 2. Accordingly, surface 13 (referred to as a top surface inreferring to FIGS. 1 and 2) is a bottom surface in the view of FIG. 3.In referring to FIG. 3 surface 13 will be referred to as a firstsurface.

Substrate 12 comprises a second surface 15 in opposing relation relativeto first surface 13. A semiconductive material-comprising chip (or die)14 is adhered to surface 15 via a pair of adhesive strips 20. Strips 20can comprise, for example, tape having a pair of opposing surfaces 22and 24, with adhesive being provided on both of such opposing surfaces.Strips 20 typically comprise insulative material. Wire bonds 28 (onlysome of which are labeled in FIG. 2) extend from circuitry 16 andthrough slit 18 to electrically connect circuitry 16 to bonding pads 25(only some of which are labeled in FIG. 2) associated with chip 14, andto accordingly electrically connect circuitry 16 with circuitry (notshown) comprised by chip 14. Chip 14 comprises a surface 17 which facessurface 15 of substrate 12. The bonding pads are on surface 17. (Thewire bonds and bonding pads are not shown in FIG. 4 for purposes ofclarity in the illustration.)

FIG. 5 illustrates further processing of the assembly 10. Specifically,FIG. 5 illustrates units 19 and 21 of FIG. 1 after a first encapsulant40 is provided over wire bonds 28, and a second encapsulant 42 isprovided over chips 14 associated with units 19 and 21. First and secondencapsulants 40 and 42 can comprise the same material and typicallycomprise an insulative material, such as, for example, cured epoxy.

Conductive balls 31 are formed over portions of circuitry 16 (shown inFIGS. 1 and 2) to form a ball grid array over circuitry 16. Such arraycan subsequently be utilized to form a plurality of interconnects fromcircuitry 16 to other circuitry (not shown). Conductive balls 31 can beformed of, for example, tin, copper or gold.

Substrate 12 is subjected to a singulation process which separates units19 and 21 from one another, and thus forms individual board-on-chippackages from units 19 and 21. The singulation process can include, forexample, cutting through encapsulant 42 and substrate 12.

Difficulties can occur in the formation of the wire bonds associatedwith a board-chip-package. Among the methods commonly utilized forforming such wire bonds are a TESSERA™ process and a so-called tabbonding process. In either of such processes, the wires utilized forwire-bonding initially have one end bonded to circuitry 16. The wiresare provided to extend at least partially across slit 18 so that asecond end (which is not bonded to circuitry 16) extends over or pastslit 18. A rod is then utilized to individually and sequentially pusheach wire into slit 18 and to hold the wire against chip 14 during anultrasonic welding process. The ultrasonic welding individually andsequentially adheres the second end of each wire to a bonding pad 25.

It would be desirable to develop alternative methods for forming wirebonds.

SUMMARY OF THE INVENTION

In one aspect, the invention encompasses a method of forming asemiconductor chip assembly. A substrate is provided. Such substrate hasa pair of opposing surfaces and circuitry formed on one of the opposingsurfaces. A semiconductor chip is joined to the substrate. Thesemiconductor chip has bonding regions thereon. A plurality of wiresjoin to the circuitry and extend over the bonding regions of thesemiconductor chip. The wires are pressed down to about the bondingregions of the semiconductor chip with a tool. The tool is lifted fromthe wires, and subsequently the wires are adhered to the bonding regionsof the semiconductor chip.

In another aspect, the invention encompasses an apparatus for formingwire bonds from circuitry on a substrate to a semiconductor chip joinedto the substrate. Such apparatus comprises a support for supporting thesubstrate and the semiconductor chip. The apparatus further comprises apressing tool movably mounted relative to the substrate, and which has adeflecting surface configured to press the wires into a slit of thesubstrate when the pressing tool is moved toward the substrate. Thedeflecting surface is substantially planar, and has a sufficient lengthto extend within a predominate portion of the slit.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a diagrammatic, fragmentary view of a prior art semiconductorassembly at a preliminary step of a die package forming process.

FIG. 2 is an expanded view of a portion of the FIG. 1 assembly.

FIG. 3 is a cross-sectional view along the line 3—3 of FIG. 2.

FIG. 4 is a cross-sectional view along the line 4—4 of FIG. 3.

FIG. 5 is a view of a portion of the FIG. 1 assembly shown beingsubjected to prior art processing subsequent to that of FIGS. 1-4.

FIG. 6 is a diagrammatic, fragmentary, perspective view of an apparatusof the present invention being utilized to process a semiconductor chipassembly.

FIG. 7 is a diagrammatic, top view of a tool encompassed by an apparatusof the present invention.

FIG. 8 is a cross-sectional, fragmentary view of the FIG. 6 apparatusshown at a processing step subsequent to that of FIG. 6, and shown alongthe line 8—8 of FIG. 6.

FIG. 9 is a view of the FIG. 6 apparatus, shown along line 8—8, andshown at a processing step subsequent to that illustrated in FIG. 8.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

The invention encompasses a new apparatus and method for forming wirebonds. Referring to FIG. 6, an apparatus 100 of the present invention isshown in fragmentary, perspective view. Apparatus 100 comprises asupport 102 configured to support a semiconductor chip assembly 104, anda tool 106 configured to displace wires associated with semiconductorchip assembly 104 to form wire bonds.

In the shown embodiment, semiconductor chip assembly 104 comprises aportion of a prior art board-on-chip assembly of the type described inthe Background section of this disclosure with reference to FIGS. 1-5.Accordingly, assembly 104 comprises a substrate 12, a semiconductivematerial chip 14, and adhesive strips 20 joining chip 14 to substrate12. Further, substrate 12 comprises an upper surface 13 having circuitry16 formed thereon and a lower surface 15 to which semiconductivematerial chip 14 is joined. Chip 14 has an upper surface 17 havingbonding pads 25 thereon (bonding pads 25 are not shown in FIG. 6 forpurposes of clarity in the illustration, but are shown in, for example,FIG. 2). Bonding pads 25 typically comprise a metal, such as, forexample, aluminum which can be ultrasonically welded to bonding wires.Bonding pads 25 can be generically referred to herein as bonding regionsto indicate that the areas 25 simply constitute regions to which wirebonds will be connected with chip 14, and do not necessarily comprisethe structures associated with bonding “pads”.

A slit 18 extends through substrate 12, and specifically extends fromupper surface 13 of substrate 12 to lower surface 15 of substrate 12.The bonding pads 25 (not shown in FIG. 6) are exposed through slit 18. Aplurality of bonding wires 28 (only some of which are labeled) areelectrically connected with circuitry 16 and extend at least partiallyover slit 18. The electrical connection of wires 28 to circuitry 16preferably comprises a form of adhesion of wires 28 to circuitry 16,such that one end of each wire is bonded to circuitry 16, andaccordingly adhered over upper surface 13 of substrate 12. Each wire 28has a second end which is not fixed, with such second end beingconfigured to be bonded with a pad 25. In the shown embodiment, some ofwires 28 extend entirely across slit 18, and some of wires 28 extendonly partially across slit 18. It is to be understood that in particularembodiments of the invention, all of wires 28 can extend entirely acrossslit 18, or none of wires 28 can extend entirely across slit 18.

Slit 18 is rectangular in shape, and comprises a length “x” and a width“y”. Further, slit 18 comprises a pair of ends 107 and 109 spaced fromone another by length “x”.

One of wires 28 is labeled as a first wire 110, and comprises the wireclosest to end 107. Another of wires 28 is labeled as a second wire 112and constitutes the wire closest to end 109. First wire 110 is spacedfrom end 107 by a gap 114, and second wire 112 is spaced from end 109 bya gap 116.

Tool 106 comprises a deflecting surface 120 configured to extend withingap 18 and push wires 28 down to about bonding pads 25 (with the term“about” indicating that the wires can be pressed all the way to contactbonding pads 25, or can be pressed into slit 18 to a distance whichleaves wires 28 elevated above pads 25). Tool 106 is shown in FIG. 7 ina view which is upside down from that of FIG. 6, and which more clearlyshows deflecting surface 120. FIG. 7 further shows that deflectingsurface 120 is substantially planar, and that tool 106 comprises othersubstantially planar surfaces 122 and 124 which are connected todeflecting surface 120 through sidewalls 126 and 128, respectively.Planar surfaces 122 and 124 are preferably configured to rest uponsurface 13 (or, more specifically, circuitry over upper surface 13) whendeflecting surface 120 is inserted within slit 18. In the shownpreferred embodiment, sidewalls 126 and 128 extend non-perpendicularlyrelative to planar surfaces 120, 122 and 124. Such non-perpendicularextension of sidewalls 126 and 128 relative to the planar surfacesavoids formation of a “tight corner” in wires 28 when the wires aredeflected into slit 18 by tool 106. The term “tight corner” beingutilized to refer to a corner which is less than or equal to about 90°.Tight corners can be undesirable, in that they can reduce current flowthrough a wire, and can also weaken the wire to cause breakage of thewire.

Deflecting surface 120 has a length “z” which is preferably about thesame length as the length “x” of slit 18. Length “z” is preferably atleast long enough to extend over a predominate portion of slit 18, andmore preferably is long enough to extend from first wire 110 to secondwire 112, such that the entire plurality of wires 28 are deflectedsimultaneously by tool 106 when the tool is moved into slit 18. Inparticular embodiments, length “z” is long enough to extend past both ofwires 110 and 112 (i.e., into gaps 114 and 116) to compensate for minormisalignment of surface 120 relative to slit 18.

It is noted that the views of FIGS. 6 and 7 show apparatus 100 as beinga fragment. In preferred embodiments, apparatus 100 is utilized beforesingulation of individual chip packages from a substrate (with thesingulation being described with reference to prior art FIG. 5).Apparatus 100 preferably comprises a repeating number of tools 106 suchthat there is a tool corresponding to each of the slits 18 repeatedacross a substrate 12 (with the repeated slits described with referenceto prior art FIG. 1) such that an entire substrate panel can besimultaneously processed by moving a plurality of tools 106 into theplurality of slits 18. In alternative embodiments, apparatus 100 cancomprise less tools 106 than there are slits 18 in a substrate, and thetools 106 can be moved stepwise from one slit 18 to another across asubstrate panel.

Referring to FIG. 8, apparatus 100 is shown at a processing stepsubsequent to that of FIG. 6, and in a cross-sectional view along line8—8 of FIG. 6. Tool 106 has now been moved into slit 18 such thatdeflecting surface 120 is pushing an end of wire 28 onto a surface ofchip 14, and specifically onto a bonding pad 25. (A gap is shown betweentool 106 and wire 28 for clarity of illustration of wire 28. Inpractice, tool 106 would be pressed against wire 28.) Although only onewire 28 is shown being deflected, it is to be understood that preferablyall of the wires 28 of FIG. 6 are being simultaneously deflected byinsertion of tool 106 into slit 18. FIG. 8 also shows that planarsurfaces 122 and 124 are configured to rest on circuitry 16 asdeflecting surface 120 deflects wires 28 against pads 25. Surfaces 122and 124 can accordingly aid in holding the bonded ends of wires 28 ontocircuitry 16 during the deflection of wire 28 by deflecting surface 120.FIG. 8 also shows that sidewalls 126 and 128 extend non-perpendicularlyrelative to the substantially planar surface 17 of chip 14.

Referring to FIG. 9, apparatus 100 is shown from the same view as FIG.8, and at a processing step subsequent to that of FIG. 8. Specifically,tool 106 has been lifted to remove deflecting surface 120 from withinslit 18, and wire 28 is adhered to pad 25. In the shown embodiment,ultrasonic energy 150 is provided to adhere wire 28 to pad 25. Inparticular embodiments, pad 25 can comprise, for example, an aluminumsurface; wire 28 can comprise, for example, gold or copper; and theultrasonic energy can effectively diffuse pad 25 and wire 28 to weldwire 28 to pad 25.

In preferred embodiments, tool 106 is entirely removed from within slit18 prior to provision of ultrasonic energy to weld wire 28 to pad 25.Such is in contrast to, for example, the Tessera™ process (describedabove with reference to prior art) wherein a wire is held in placeduring provision of ultrasonic energy. Also, the invention differs fromboth the tab bonding and Tessera™ processes in that most, and preferablyall, of the wire bonds extending across a slit are simultaneouslydeflected in a method of the present invention. In contrast, in theTessera™ and tab bonding processes, the wires are deflected sequentiallyinto a slit.

It is noted that although the invention is described above withreference to board-on-chip semiconductor fabrication processes, theinvention can have application to other processes wherein wires are tobe deflected, as well as to other applications wherein wires are to beutilized for wire bonding a semiconductor chip to circuitry. It isfurther noted that although ultrasonic welding is disclosed as a methodof bonding wire 28 to pad 25, the invention can be utilized with othermethods of adhering a wire to a semiconductor substrate, including, forexample, the utilization of a conductive epoxy.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

What is claimed is:
 1. An apparatus for forming wire bonds fromcircuitry on a substrate to a semiconductor chip joined to thesubstrate; wherein the substrate has a pair of first and second opposingsurfaces; wherein the circuitry is proximate the second opposing surfaceof the substrate and the semiconductor chip is proximate the firstopposing surface of the substrate; wherein a slit extends through thesubstrate from the second opposing surface to the first opposingsurface; wherein the slit has a length and a width, and has a pair ofends spaced from one another by the length; and wherein a plurality ofbonding wires are provided to extend at least partially across the slit,the apparatus comprising: a support for supporting the substrate andsemiconductor chip, the support being adapted to engage the firstsurface of the substrate; and a pressing tool movably mounted relativeto the substrate, the pressing tool adapted to be positioned proximatethe second surface of the substrate and adapted to be simultaneouslyengageable with the plurality of bonding wires and moveable at leastpartially into the slit, the pressing tool having a deflecting surfaceconfigured to simultaneously press the wires into the slit and intocontact with corresponding contact pads on the semiconductor chip whenthe pressing tool is moved toward the substrate, the deflecting surfacebeing substantially planar and having a sufficient length to extendacross a predominate portion of the length of the slit.
 2. An apparatusfor forming wire bonds from circuitry on a substrate to a semiconductorchip joined to the substrate; wherein the substrate has a pair of firstand second opposing surfaces; wherein the circuitry is proximate thesecond opposing surface of the substrate and the semiconductor chip isproximate the first opposing surface of the substrate, the apparatuscomprising: a slit extending through the substrate from the firstsurface to the second surface, the slit having a length and a width, theslit also including a pair of ends spaced from one another by thelength, the pair of ends being a first end and a second end; a pluralityof bonding wires extending at least partially across the slit, a firstwire being closer to the first end than any of the other wires of theplurality of wires, and a second wire being closer to the second endthan any of the other wires of the plurality of wires; a support forsupporting the substrate and semiconductor chip, the support beingadapted to engage the first surface of the substrate; and a pressingtool movably mounted relative to the substrate, the pressing tool havinga substantially planar deflecting surface configured to press the wiresinto the slit, the tool extending from the first wire to the secondwire, the tool being configured to press the first and second wiressimultaneously into the slit when the pressing tool is moved toward thesubstrate.
 3. The apparatus of claim 2 wherein the pressing tool isfurther configured to press the wires against a surface of thesemiconductor chip when the tool is moved toward the substrate.
 4. Theapparatus of claim 2 wherein a first gap is between the first wire andthe first end of the slit, wherein a second gap is between the secondwire and the second end of the slit, and wherein the deflecting surfaceis sufficiently long to extend into at least one of the first and secondgaps.
 5. The apparatus of claim 4 wherein the deflecting surface issufficiently long to extend into both of the first and second gaps. 6.The apparatus of claim 2 wherein the pressing tool has a mating surfaceconfigured to press ends of the wires against the substrate as thedeflecting surface presses other ends of the wires into the slit, themating surface being joined to the deflecting surface by a sidewall. 7.The apparatus of claim 2 wherein the pressing tool has a mating surfaceconfigured to press ends of the wires against the substrate as thedeflecting surface presses other ends of the wires into the slit,wherein the semiconductor chip has a substantially planar surface facingthe substrate, the mating surface being joined to the deflecting surfaceby a sidewall, the sidewall extending non-perpendicularly relative tothe plane of the substantially planar surface of the semiconductor chip.8. The apparatus of claim 2 wherein the pressing tool has a matingsurface configured to press ends of the wires against the substrate asthe deflecting surface presses other ends of the wires into the slit,the mating surface being substantially planar, the mating surface beingjoined to the deflecting surface by a sidewall, the sidewall extendingnon-perpendicularly relative to the plane of the planar mating surface.9. The apparatus of claim 2 wherein the pressing tool has a matingsurface configured to press ends of the wires against the substrate asthe deflecting surface presses other ends of the wires into the slit,the mating surface being joined to the deflecting surface by a sidewall,the sidewall extending non-perpendicularly relative to the plane of theplanar mating surface.
 10. The apparatus of claim 2 wherein the pressingtool is further configured to press the first and second wires down toabout the upper surface of the semiconductor chip when the tool is movedtoward the substrate.
 11. An apparatus for simultaneously mechanicallydeforming a plurality of bonding wires of a semiconductor device,comprising: a support member adapted to engage a first surface of thesemiconductor device; and a pressing member adapted to be adjustablypositionable proximate a second surface of the semiconductor device, thesecond surface being substantially opposite the first surface, thepressing member including a deflecting surface adapted to simultaneouslyengage a plurality of bonding wires of the semiconductor device, thedeflecting surface being adapted to at least partially extend into anelongated slit disposed within the second surface of the semiconductordevice, the deflecting surface having a substantially planar portionadapted to be simultaneously engageable with the plurality of bondingwires.
 12. The apparatus of claim 11 wherein the pressing tool isfurther configured to have a sufficient length to extend across all ofthe plurality of wires.
 13. The apparatus of claim 11 wherein thedeflecting surface is sized to occupy substantially the entire length ofthe elongated slit.
 14. The apparatus of claim 11 wherein the pressingtool has a mating surface configured to press ends of the wires againstthe second surface as the deflecting surface presses other ends of thewires into the slit, the mating surface being joined to the deflectingsurface by a sidewall.
 15. The apparatus of claim 11 wherein thesemiconductor device comprises a substantially planar substrate surfacelocated within the slit, the pressing tool having a mating surfaceconfigured to press ends of the wires against the second surface as thedeflecting surface presses other ends of the wires into the slit, andfurther wherein the semiconductor device has a substantially planarsurface facing the substrate surface, the mating surface being joined tothe deflecting surface by a sidewall, the sidewall extendingnon-perpendicularly relative to the plane of the substantially planarsurface of the semiconductor device.
 16. The apparatus of claim 15wherein the mating surface is substantially planar.
 17. The apparatus ofclaim 15 wherein the pressing tool is further configured to press thewires down to about the substrate surface when the tool is moved towardthe second surface.
 18. The apparatus of claim 15 wherein the pressingtool is further configured to press the wires against the substratesurface when the tool is moved toward the second surface.
 19. Theapparatus of claim 14 wherein the sidewall is configured so that wiresdo not go through a bend exceeding 90 degrees when they are pressed intothe slit.
 20. The apparatus of claim 14 wherein the slit has a length, awidth, and a first end and a second end spaced from one another by thelength, the plurality of bonding wires extending at least partiallyacross the slit, a first wire being closer to the first end than any ofthe other wires of the plurality of wires, and a second wire beingcloser to the second end than any of the other wires of the plurality ofwires, the deflecting surface having a length substantially that of theslit length such that the deflecting surface extends at least from thefirst wire to the second wire.